Detail Journal of Microelectro Mechanical System vol. 5 no. 3 (1996) Bibliografi Topik: TECHNOLOGY Bahasa: (EN )    ISSN: 10577157    Year:: 1996     Penerbit: IEEE/Asme Publications Jenis: Bulletin/Magazine [Lihat daftar eksemplar jurnal Journal of Microelectro Mechanical System] Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.1 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Artikel dalam koleksi ini Fracture Testing of Bulk Silicon Microcantilever Beams Subjected to A Side Load, halaman 142-150 A Fully Integrated Micromachined Magnetic Particle Separator, halaman 151-158 Linear Microvibromotor for Positioning Optical Components, halaman 159-165 A Hermetic Glass-Silicon Micropackage With High-Density On-Chip Feed Throughs for Sensors and Actuators, halaman 166-179 Fabrication of A Silicon-Based Superfluid Oscillator, halaman 180-186 The Development of A Low-Stress Polysilicon Process Compatible With Standard Device Processing, halaman 187-196 Design and Fabrication of Silicon Condenser Microphone Using Corrugated Diaphragm Technique, halaman 197-204 Computation of Static Shapes and Voltages for Micromachined Deformable Mirrors With Nonlinear Electrostatic Actuators, halaman 205-220 Extension of The Boundary Element Method to Systems With Conductors and Piece-Wise Constant Dielectrics, halaman 221-227  Edit Artikel Lihat Sejarah Pengadaan  Konversi Metadata   Kembali

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