Detail Journal of Microelectro Mechanical System vol. 5 no. 2 (1996) Bibliografi Topik: TECHNOLOGY Bahasa: (EN )    ISSN: 10577157    Year:: 1996     Penerbit: IEEE/Asme Publications Jenis: Bulletin/Magazine [Lihat daftar eksemplar jurnal Journal of Microelectro Mechanical System] Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.1 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Artikel dalam koleksi ini Planarity of Large MEMS, halaman 79-97 Surface-Micromachined Capacitive Differential Pressure Sensor With Lithographically Defined Silicon Diaphragm, halaman 98-105 On Hillocks Generated During Anisotropic Etching of Si in TMAH, halaman 106-116 Silicon-Based Microelectrodes for Neurophysiology Fabricated Using A Gold Metallization/Nitride Passivation System, halaman 117-121 Resonant Silicon Accelerometers in Bulk Micromachining Technology-An Approach, halaman 122-130 Uncooled IR Imaging Array Based on Quartz Microresonators, halaman 131-137 Chemical Sensor Based on Quartz Microresonators, halaman 138-140 Acknowledgments, halaman 78  Edit Artikel Lihat Sejarah Pengadaan  Konversi Metadata   Kembali

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