Detail Journal of Microelectro Mechanical System vol. 5 no. 1 (1996) Bibliografi Topik: TECHNOLOGY Bahasa: (EN )    ISSN: 10577157    Year:: 1996     Penerbit: IEEE/Asme Publications Jenis: Bulletin/Magazine [Lihat daftar eksemplar jurnal Journal of Microelectro Mechanical System] Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.1 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Artikel dalam koleksi ini An Electrochemical Microactuator : Principle and First Results, halaman 2-9 Surface-Micromachined Components for Articulated Microrobots, halaman 10-17 Released Si Microstructures Fabricated By Deep Etching and Shallow Diffusion, halaman 18-23 Three-Dimensional Microfabrication By Localized Electrochemical Deposition, halaman 24-32 Development of The Micromiling Process for High-Aspect-Ratio Microstructures, halaman 33-38 Vibration Modes of a Resonant Silicon Tube Density Sensor, halaman 39-44 Fabrication of A Mechanical Antireflection Switch for Fiber-to-The-Home Systems, halaman 45-51 Bent-Beam Strain Sensors, halaman 52-58 A Computational Study of Radiometric Phenomena for Powering Microactuators With Unlimited Displacements and Large Available Forces, halaman 59-65 Mechanisms of Etch Hillock Formation, halaman 66-72 Correction to "Magnetic Microactuation of Polysilicon Flexure Structures" [Erratum[, halaman 73  Edit Artikel Lihat Sejarah Pengadaan  Konversi Metadata   Kembali

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